表面分析技術
Surface Analysis Techniques
| 節 | 週二 | 週四 |
|---|---|---|
4 11:10–12:00 | 表面分析技術 EF201（光復） | |
5 13:20–14:10 | 表面分析技術 EF201（光復） 2 節連堂 | |
6 14:20–15:10 |
* 根據陽明交大上課時間表所列
協助同學瞭解材料表面分析技術之原理與應用。以薄膜製程研發及積體電路材料之相關檢測技術為授課重點。 1. Introduction to surface properties of materials 2. Vacuum technology 3. Electron spectroscopies: Auger, ESCA, UPS 4. Ion spectroscopies: SIMS, ISS, RBS 5. Surface structure analysis: SEM, AFM, STM 6. Surface diffractometer: LEED 7. Vibrational spectroscopies: RAIR, RAMAN, EELS 7. Thermal desorption spectroscopy (TDS)
Must: 普通物理 (general physics),普通化學(general chemistry)。 Suggested: 量子力學 (quantumn mechanics),物理化學 (physical chemistry),半導體物理與製程 (semiconductor physics and manufacturing)
無備註
PPT slide presentation in English. Lecture notes.
The average of the midterm and the final examinations occupies 85% of the final academic score. The rest (15%) depends on your class performance.
- Introduction to surface analyses
- Vacuum technology
- Electron spectroscopy
- Electron spectroscopy
- Ion spectroscopy
- Ion spectroscopy
- Suface structure analysis
- Suface structure analysis
- Suface structure analysis - Surface diffraction
- Vibrational spectroscopy
- Thermal desorption
教師未提供此項資料
(參考書) Surface Analysis – The Principle Techniques", John C. Vickerman, John Wiley & Sons (1997).
- 地點
- EF322
- 時間
- By appointment.
- 聯絡方式
- Office Tel: 5131322 E-mail: fmpan@faculty.nctu.edu.tw